1. High-power impulse magnetron sputter deposition of TiBx thin films: Effects of pressure and growth temperature. (November 2019) Authors: Hellgren, Niklas; Thörnberg, Jimmy; Zhirkov, Igor; Sortica, Maurico A.; Petrov, Ivan; Greene, J.E.; Hultman, Lars; Rosen, Johanna Journal: Vacuum Issue: Volume 169(2019) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗