1. Blister suppression in the CO+ molecule implanted SOI substrates with ultrathin buried oxides. (September 2021) Authors: Popov, V.P.; Tikhonenko, F.V.; Antonov, V.A.; Tarkov, S.M.; Gutakovskii, A.K.; Vdovin, V.I.; Simakin, S.G.; Rudenko, K.V. Journal: Materials today communications Issue: Volume 28(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗