1. Impact of etch angles on cell characteristics in 3D NAND flash memory. (September 2018) Authors: Oh, Young-Taek; Kim, Kyu-Beom; Shin, Sang-Hoon; Sim, Hahng; Van Toan, Nguyen; Ono, Takahito; Song, Yun-Heub Journal: Microelectronics journal Issue: Volume 79(2018) Page Start: 1 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗