1. The role of thermal processes and target evaporation in formation of self-sputtering mode for copper magnetron sputtering. (June 2018) Authors: Bleykher, G.A.; Yuryeva, A.V.; Shabunin, A.S.; Krivobokov, V.P.; Sidelev, D.V. Journal: Vacuum Issue: Volume 152(2018) Page Start: 156 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗