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You searched for: Author/Creator Si, Chaowei- Si, Chaowei [remove] 5
- 541.3 2
- 621.38152 2
- Chemistry, Physical and theoretical -- Periodicals 2
- Semiconductors -- Periodicals 2
- 2575 1
- 546.05 1
- Chemistry, Inorganic -- Periodicals 1
- SOG process -- DRIE cut-off layer -- ITO film -- foot effect 1
- dielectric parasitic charge -- micro-electro-mechanical system (MEMS) gyroscopes -- frequency drift -- DC voltage 1