1. Elucidating the role of nitrogen plasma composition in the low-temperature self-limiting growth of indium nitride thin films. Issue 46 (21st July 2020) Authors: Ilhom, Saidjafarzoda; Mohammad, Adnan; Shukla, Deepa; Grasso, John; Willis, Brian G.; Okyay, Ali K.; Biyikli, Necmi Journal: RSC advances Issue: Volume 10:Issue 46(2020) Page Start: 27357 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗