Author/Creator: Shirakawa, Hajime - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Shirakawa, Hajime

1. Dual-Fluid Spray Process for Particle and Fluorocarbon-Polymer Removal in BEOL Applications. (11th September 2015)

Authors:: Iwasaki, Akihisa; Higuchi, Ayumi; Komori, Kana; Sato, Masanobu; Shirakawa, Hajime
Journal:: ECS transactions
Issue:: Volume 69:Number 8(2015)
Page Start:: 199
Record Type:: Journal Article
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2. Oxygen Control Challenge for Advanced Wet Processing. (11th September 2015)

Authors:: Yoshida, Yukifumi; Otsuji, Masayuki; Takahashi, H.; Snow, Jim; Sebaai, Farid; Holsteyns, Frank; Mertens, Paul W.; Sato, Masanobu; Shirakawa, Hajime; Uchida, H.
Journal:: ECS transactions
Issue:: Volume 69:Number 8(2015)
Page Start:: 29
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗