1. Investigation of etching selectivity and microstructure of Ag-doped Sb2Te thin film for dry lithography. (20th January 2022) Authors: Wei, Tao; Shen, Wancheng; Chen, Xingwang; Chen, Lei; Hu, Jing; Cheng, Miao; Liu, Qianqian; Li, Wanfei; Ling, Yun; Wei, Jingsong; Liu, Bo Journal: Semiconductor science and technology Issue: Volume 37:Number 3(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗