Author/Creator: Shabunin, A.S. - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Shabunin, A.S.

1. The properties of Cu films deposited by high rate magnetron sputtering from a liquid target. (November 2019)

Authors:: Bleykher, G.A.; Yuryeva, A.V.; Shabunin, A.S.; Sidelev, D.V.; Grudinin, V.A.; Yuryev, Yu.N.
Journal:: Vacuum
Issue:: Volume 169(2019)
Page Start:
Record Type:: Journal Article
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2. The role of thermal processes and target evaporation in formation of self-sputtering mode for copper magnetron sputtering. (June 2018)

Authors:: Bleykher, G.A.; Yuryeva, A.V.; Shabunin, A.S.; Krivobokov, V.P.; Sidelev, D.V.
Journal:: Vacuum
Issue:: Volume 152(2018)
Page Start:: 156
Record Type:: Journal Article
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