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- Scurati, Mario [remove] 1
- 3D microcapacitor -- Silicon integrated capacitor -- High areal capacitance -- High aspect-ratio trench -- Atomic layer deposition -- Electrochemical etching 1
- 621.042 1
- Nanoscience 1
- Nanoscience -- Periodicals 1
- Nanostructured materials 1
- Nanostructured materials -- Periodicals 1
- Nanotechnology 1
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- Power resources -- Technological innovations 1