Author/Creator: Savchuk, Olga - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Savchuk, Olga

1. Nonparametric estimation of SiC film residual stress from the wafer surface profile. (June 2021)

Authors:: Savchuk, Olga; Volinsky, Alex A.
Journal:: Measurement
Issue:: Volume 177(2021)
Page Start:
Record Type:: Journal Article
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