1. Application of Langmuir probe and optical emission spectroscopy for bromofluorocarbon plasma diagnostics. Issue 1 (April 2021) Authors: Kuzmenko, V; Miakonkikh, A; Rudenko, K Journal: Journal of physics Issue: Volume 1870:Issue 1(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. CF3Br plasma cryo etching of low-k porous dielectric. (August 2016) Authors: Clemente, I; Koehler, N; Miakonkikh, A; Zimmermann, S; Schulz, S E; Rudenko, K Journal: Journal of physics Issue: Volume 741(2016) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗