1. Experiments on the Release of CMOS-Micromachined Metal Layers. (18th April 2010) Authors: Fernández, Daniel; Ricart, Jordi; Madrenas, Jordi Other Names: Tenje Maria Academic Editor. Journal: Journal of sensors Issue: Volume 2010(2010) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗