1. Fabrication of boron doped diamond cantilevers by means of dry ICP etching. (September 2019) Authors: Vojs, M; Marton, M; Jančo, M; Behúl, M; Řeháček, V; Michniak, P; Držík, M; Redhammer, R Journal: Journal of physics Issue: Volume 1319(2019) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗