1. Advanced quantitative analysis of epitaxial SiGe composition on production wafer for logic devices. (7th November 2017) Authors: Penley, Christopher; Walker, Michael; Wilson, Michael; Billingsley, Daniel; Raviswaran, Arvind; Phillips, Shane Journal: Surface and interface analysis Issue: Volume 50:Number 1(2018) Page Start: 90 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗