1. Critical BEOL Aspects of the Fabrication of a Thermally-Assisted MRAM Device. (9th September 2015) Authors: O'Sullivan, E. J.; Edelstein, Daniel; Marchack, Nathan; Lofaro, Michael; Gaidis, Michael; Joseph, Eric; Annunziata, Anthony; Pfeiffer, Dirk; Trouilloud, P. L.; Zhu, Yu; Holmes, Steve; Galan, Armand; Pyzna, Adam M.; Gonsalves, Jemima Journal: ECS transactions Issue: Volume 69:Number 3(2015) Page Start: 127 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗