1. An 8-inch commercial aluminum nitride MEMS platform for the co-existence of Lamb wave and film bulk acoustic wave resonators. (16th March 2023) Authors: Hsu, Tzu-Hsuan; Tung, Shao-Siang; Huang, Yan-Ming; Wu, Guan-Lin; Chang, Chin-Yu; Ho, Yens; Chen, Yung-Hsiang; Pradeep, Yelehanka; Chand, Rakesh; Li, Ming-Huang Journal: Journal of micromechanics and microengineering Issue: Volume 33:Number 5(2023) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗