Author/Creator: Poodt, P. - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Poodt, P.

1. Cyclic Etch/Passivation-Deposition as an All-Spatial Concept toward High-Rate Room Temperature Atomic Layer Etching. (1st January 2015)

Authors:: Roozeboom, F.; van den Bruele, F.; Creyghton, Y.; Poodt, P.; Kessels, W. M. M.
Journal:: ECS journal of solid state science and technology
Issue:: Volume 4:Number 6(2015)
Page Start:: N5067
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

2. Cyclic Etch/Passivation-Deposition as an All-Spatial Concept toward High-Rate Room Temperature Atomic Layer Etching. (7th April 2015)

Authors:: Roozeboom, F.; van den Bruele, F.; Creyghton, Y.; Poodt, P.; Kessels, W. M. M.
Journal:: ECS journal of solid state science and technology
Issue:: Volume 4:Number 6(2015)
Page Start:: N5067
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

3. Plasma-Enhanced Atmospheric-Pressure Spatial ALD of Al2O3 and ZrO2. (16th August 2016)

Authors:: Creyghton, Yves; Illiberi, A.; Mione, A.; van Boekel, W.; Debernardi, N.; Seitz, M; van den Bruele, Fieke; Poodt, P.; Roozeboom, Fred
Journal:: ECS transactions
Issue:: Volume 75:Number 6(2016)
Page Start:: 11
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗