1. Correlative STEM-HAADF and STEM-EDX tomography for the 3D morphological and chemical analysis of semiconductor devices. (22nd January 2021) Authors: Jacob, Martin; Sorel, Julien; Pinhiero, Rafael Bortolin; Mazen, Frederic; Grenier, Adeline; Epicier, Thierry; Saghi, Zineb Journal: Semiconductor science and technology Issue: Volume 36:Number 3(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗