Author/Creator: Patlolla, R. - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Patlolla, R.

1. Citric Acid as a Complexing Agent in Chemical Mechanical Polishing Slurries for Cobalt Films for Interconnect Applications. (10th August 2017)

Authors:: Popuri, R.; Sagi, K. V.; Alety, S. R.; Peethala, B. C.; Amanapu, H.; Patlolla, R.; Babu, S. V.
Journal:: ECS journal of solid state science and technology
Issue:: Volume 6:Number 9(2017)
Page Start:: P594
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

2. Citric Acid as a Complexing Agent in Chemical Mechanical Polishing Slurries for Cobalt Films for Interconnect Applications. (1st January 2017)

Authors:: Popuri, R.; Sagi, K. V.; Alety, S. R.; Peethala, B. C.; Amanapu, H.; Patlolla, R.; Babu, S. V.
Journal:: ECS journal of solid state science and technology
Issue:: Volume 6:Number 9(2017)
Page Start:: P594
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗