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Author/Creator Paquette, Michelle M.

1. Carbon‐Enriched Amorphous Hydrogenated Boron Carbide Films for Very‐Low‐k Interlayer Dielectrics. (21st September 2017)

Authors:
Nordell, Bradley J.; Nguyen, Thuong D.; Caruso, Anthony N.; Purohit, Sudhaunshu S.; Oyler, Nathan A.; Lanford, William A.; Gidley, David W.; Gaskins, John T.; Hopkins, Patrick E.; Henry, Patrick; King, Sean W.; Paquette, Michelle M.
Journal:
Advanced Electronic Materials
Issue:
Volume 3:Number 12(2017)
Page Start:
n/a
Record Type:
Journal Article
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Available online (eLD content is only available in our Reading Rooms) ↗

2. Conquering the Low‐k Death Curve: Insulating Boron Carbide Dielectrics with Superior Mechanical Properties. (30th May 2016)

Authors:
Nordell, Bradley J.; Nguyen, Thuong D.; Keck, Christopher L.; Dhungana, Shailesh; Caruso, Anthony N.; Lanford, William A.; Gaskins, John T.; Hopkins, Patrick E.; Merrill, Devin R.; Johnson, David C.; Ross, Liza L.; Henry, Patrick; King, Sean W.; Paquette, Michelle M.
Journal:
Advanced Electronic Materials
Issue:
Volume 2:Number 7(2016)
Page Start:
n/a
Record Type:
Journal Article
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3. Erratum: Review—Investigation and Review of the Thermal, Mechanical, Electrical, Optical, and Structural Properties of Atomic Layer Deposited High-k Dielectrics: Beryllium Oxide, Aluminum Oxide, Hafnium Oxide, and Aluminum Nitride [ECS J. Solid State Sci. Technol., 6, N189 (2017)]. (1st January 2018)

Authors:
Gaskins, John T.; Hopkins, Patrick E.; Merrill, Devin R.; Bauers, Sage R.; Hadland, Erik; Johnson, David C.; Koh, Donghyi; Yum, Jung Hwan; Banerjee, Sanjay; Nordell, Bradley J.; Paquette, Michelle M.; Caruso, Anthony N.; Lanford, William A.; Henry, Patrick; Ross, Liza; Li, Han; Li, Liyi; French, ...
Journal:
ECS journal of solid state science and technology
Issue:
Volume 7:Number 5(2018)
Page Start:
X3
Record Type:
Journal Article
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗

4. Erratum: Review—Investigation and Review of the Thermal, Mechanical, Electrical, Optical, and Structural Properties of Atomic Layer Deposited High-k Dielectrics: Beryllium Oxide, Aluminum Oxide, Hafnium Oxide, and Aluminum Nitride [ECS J. Solid State Sci. Technol., 6, N189 (2017)]. (24th April 2018)

Authors:
Gaskins, John T.; Hopkins, Patrick E.; Merrill, Devin R.; Bauers, Sage R.; Hadland, Erik; Johnson, David C.; Koh, Donghyi; Yum, Jung Hwan; Banerjee, Sanjay; Nordell, Bradley J.; Paquette, Michelle M.; Caruso, Anthony N.; Lanford, William A.; Henry, Patrick; Ross, Liza; Li, Han; Li, Liyi; French, ...
Journal:
ECS journal of solid state science and technology
Issue:
Volume 7:Number 5(2018)
Page Start:
X3
Record Type:
Journal Article
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗

7. Review—Investigation and Review of the Thermal, Mechanical, Electrical, Optical, and Structural Properties of Atomic Layer Deposited High-k Dielectrics: Beryllium Oxide, Aluminum Oxide, Hafnium Oxide, and Aluminum Nitride. (1st January 2017)

Authors:
Gaskins, John T.; Hopkins, Patrick E.; Merrill, Devin R.; Bauers, Sage R.; Hadland, Erik; Johnson, David C.; Koh, Donghyi; Yum, Jung Hwan; Banerjee, Sanjay; Nordell, Bradley J.; Paquette, Michelle M.; Caruso, Anthony N.; Lanford, William A.; Henry, Patrick; Ross, Liza; Li, Han; Li, Liyi; French, ...
Journal:
ECS journal of solid state science and technology
Issue:
Volume 6:Number 10(2017)
Page Start:
N189
Record Type:
Journal Article
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗

8. Review—Investigation and Review of the Thermal, Mechanical, Electrical, Optical, and Structural Properties of Atomic Layer Deposited High-k Dielectrics: Beryllium Oxide, Aluminum Oxide, Hafnium Oxide, and Aluminum Nitride. (5th October 2017)

Authors:
Gaskins, John T.; Hopkins, Patrick E.; Merrill, Devin R.; Bauers, Sage R.; Hadland, Erik; Johnson, David C.; Koh, Donghyi; Yum, Jung Hwan; Banerjee, Sanjay; Nordell, Bradley J.; Paquette, Michelle M.; Caruso, Anthony N.; Lanford, William A.; Henry, Patrick; Ross, Liza; Li, Han; Li, Liyi; French, ...
Journal:
ECS journal of solid state science and technology
Issue:
Volume 6:Number 10(2017)
Page Start:
N189
Record Type:
Journal Article
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗