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You searched for: Author/Creator Oh, Hongjun- Oh, Hongjun [remove] 2
- 546.05 1
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- ALD‐etch supercycle -- aminosilane precursor -- area‐selective atomic layer deposition -- density functional theory -- enlarged deposition selectivity -- inherent substrate‐dependent selectivity 1
- Chemical vapor deposition -- Periodicals 1
- Chemistry, Inorganic -- Periodicals 1
- Chemistry, Physical and theoretical -- Periodicals 1
- Materials -- Periodicals 1