1. Hot target magnetron sputtering enhanced by RF-ICP source: Microstructure and functional properties of CrNx coatings. (June 2022) Authors: Grudinin, V.A.; Bleykher, G.A.; Krivobokov, V.P.; Semyonov, O.V.; Obrosov, A.; Weiβ, S.; Sidelev, D.V. Journal: Vacuum Issue: Volume 200(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗