1. A comparative analysis of different measurement techniques to monitor metal and organic contamination in silicon device processing. Issue 3 (25th February 2015) Authors: Polignano, M. L.; Codegoni, D.; Grasso, S.; Mica, I.; Borionetti, G.; Nutsch, A. Journal: Physica status solidi Issue: Volume 212:Issue 3(2015:Mar.) Page Start: 495 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗