1. (Invited) Development of CMOS-MEMS Cointegrated Pressure Sensor Using Minimal Fab Process. (24th April 2020) Authors: Liu, Yongxun; Akita, Ippei; Matsukawa, Takashi; Tanaka, Hiroyuki; Koga, Kazuhiro; Nemoto, Kazumasa; Khumpuang, Sommawan; Nagao, Masayoshi; Morita, Yukinori; Hara, Shiro Journal: ECS transactions Issue: Volume 97:Number 1(2020) Page Start: 35 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗