1. Effects of amplitude modulated capacitively coupled discharge Ar plasma on kinetic energy and angular distribution function of ions impinging on electrodes: particle-in-cell/Monte Carlo collision model simulation. (1st October 2022) Authors: Abe, Kohei; Kamataki, Kunihiro; Yamamoto, Akihiro; Nagao, Iori; Otaka, Michihiro; Yamashita, Daisuke; Okumura, Takamasa; Yamashita, Naoto; Itagaki, Naho; Koga, Kazunori; Shiratani, Masaharu Journal: Japanese journal of applied physics Issue: Volume 61:Number 10(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗