Author/Creator: Motono, Tomohiro - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Motono, Tomohiro

1. Application of ethyltrimethylammonium hydroxide (ETMAH) as an alternative developer solution/process for semiconductor lithography. (22nd February 2021)

Authors:: Santillan, Julius Joseph; Harumoto, Masahiko; Motono, Tomohiro; dos Santos, Andreia Figueiredo; Mori, Chisayo; Tanaka, Yuji; Stokes, Harold; Asai, Masaya; Itani, Toshiro
Journal:: Japanese journal of applied physics
Issue:: Volume 60:Number SC(2021)
Page Start:
Record Type:: Journal Article
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2. Chromatographic behavior of small organic compounds in low‐temperature high‐performance liquid chromatography using liquid carbon dioxide as the mobile phase. Issue 14 (29th May 2015)

Authors:: Motono, Tomohiro; Nagai, Takashi; Kitagawa, Shinya; Ohtani, Hajime
Journal:: Journal of separation science
Issue:: Volume 38:Issue 14(2015:Jul.)
Page Start:: 2381
Record Type:: Journal Article
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3. Pattern collapse mitigation by controlling atmosphere during development process for semiconductor lithography. (13th April 2021)

Authors:: Harumoto, Masahiko; Motono, Tomohiro; dos Santos, Andreia Figueiredo; Mori, Chisayo; Tanaka, Yuji; Stokes, Harold; Asai, Masaya; Santillan, Julius Joseph; Itani, Toshiro; Kozawa, Takahiro
Journal:: Japanese journal of applied physics
Issue:: Volume 60:Number SC(2021)
Page Start:
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗