1. Particle-in-cell Monte Carlo collision simulation and experimental measurement of Ar plasma in a fast atom beam source for surface-activated bonding. (2nd March 2021) Authors: Morisaki, Ryo; Yamazaki, Takahiro; Oka, Chiemi; Sakurai, Junpei; Hirai, Takami; Takahashi, Tomonori; Tsuji, Hiroyuki; Ohno, Noriyasu; Hata, Seiichi Journal: Japanese journal of applied physics Issue: Volume 60:Number SC(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗