1. Excimer laser doping using highly doped silicon nanoparticles. Issue 11 (26th August 2013) Authors: Meseth, Martin; Kunert, Bernd Christian; Bitzer, Lucas; Kunze, Frederik; Meyer, Sebastian; Kiefer, Fabian; Dehnen, Martin; Orthner, Hans; Petermann, Nils; Kummer, Malin; Wiggers, Hartmut; Harder, Nils‐Peter; Benson, Niels; Schmechel, Roland Journal: Physica status solidi Issue: Volume 210:Issue 11(2013:Nov.) Page Start: 2456 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗