1. Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: a physics and chemistry perspective. (30th May 2019) Authors: Ishikawa, Kenji; Ishijima, Tatsuo; Shirafuji, Tatsuru; Armini, Silvia; Despiau-Pujo, Emilie; Gottscho, Richard A.; Kanarik, Keren J.; Leusink, Gert J.; Marchack, Nathan; Murayama, Takahide; Morikawa, Yasuhiro; Oehrlein, Gottlieb S.; Park, Sangwuk; Hayashi, Hisataka; Kinoshita, Keizo Journal: Japanese journal of applied physics Issue: Volume 58:Number SE(2019) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Critical BEOL Aspects of the Fabrication of a Thermally-Assisted MRAM Device. (9th September 2015) Authors: O'Sullivan, E. J.; Edelstein, Daniel; Marchack, Nathan; Lofaro, Michael; Gaidis, Michael; Joseph, Eric; Annunziata, Anthony; Pfeiffer, Dirk; Trouilloud, P. L.; Zhu, Yu; Holmes, Steve; Galan, Armand; Pyzna, Adam M.; Gonsalves, Jemima Journal: ECS transactions Issue: Volume 69:Number 3(2015) Page Start: 127 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Utilizing surface modification in plasma‐enhanced cyclic etching of tantalum nitride to surpass lithographic limits. Issue 9 (2nd April 2019) Authors: Marchack, Nathan; Hernandez, Keith; Walusiak, Benjamin; Innocent‐Dolor, Jon‐l; Engelmann, Sebastian Other Names: Hamaguchi Satoshi guestEditor.; Agarwal Sumit guestEditor.; Zajickova Lenka guestEditor. Journal: Plasma processes and polymers Issue: Volume 16:Issue 9(2019) Page Start: n/a Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Cover Picture: Plasma Process. Polym. 9/2019. Issue 9 (5th September 2019) Authors: Marchack, Nathan; Hernandez, Keith; Walusiak, Benjamin; Innocent‐Dolor, Jon‐l; Engelmann, Sebastian Other Names: Hamaguchi Satoshi guestEditor.; Agarwal Sumit guestEditor.; Zajickova Lenka guestEditor. Journal: Plasma processes and polymers Issue: Volume 16:Issue 9(2019) Page Start: n/a Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗