1. Simultaneous DualEELS and EDS analysis across the ohmic contact region in 3D NAND storage and FinFET electronic devices. (July 2017) Authors: Longo, P.; Zhang, H.; Twesten, R.D. Journal: Materials science in semiconductor processing Issue: Volume 65(2017) Page Start: 44 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗