1. Partial decarboxylation of hafnium oxide clusters for high resolution lithographic applications. Issue 41 (7th October 2022) Authors: Liao, Pin-Chia; Chen, Po-Hsiung; Tseng, Yu-Fang; Shih, Ting-An; Lin, Ting-An; Gau, Tsi-Sheng; Lin, Burn-Jeng; Chiu, Po-Wen; Liu, Jui-Hsiung Journal: Journal of materials chemistry Issue: Volume 10:Issue 41(2022) Page Start: 15647 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗