1. Low-Resistivity Cobalt and Ruthenium Ultra-Thin Film Deposition Using Bipolar HiPIMS Technique. (1st March 2022) Authors: Seo, Min; Cho, Min Kyung; Kang, Un Hyeon; Jeon, Sin Young; Lim, Sang-Ho; Han, Seung Hee Journal: ECS journal of solid state science and technology Issue: Volume 11:Number 3(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗