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Author/Creator Liang, Zhihu

1. Commercialization of microcavity plasma devices and arrays: Systems for VUV photolithography and nanopatterning, disinfection of drinking water and air, and biofilm deactivation for medical therapeutics. Issue 10 (17th August 2022)

Authors:
Kim, Jinhong; Mironov, Andrey E.; Cho, Jin H.; Sievers, Dane S.; Herring, Cyrus M.; Park, Sehyun; Sun, Peter P.; Liang, Zhihu; Chen, Wenyuan; Park, Sung‐Jin; Eden, J. Gary
Journal:
Plasma processes and polymers
Issue:
Volume 19:Issue 10(2022)
Page Start:
n/a
Record Type:
Journal Article
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