1. An optical MEMS accelerometer fabricated using double-sided deep reactive ion etching on silicon-on-insulator wafer. (19th April 2017) Authors: Teo, Adrian J T; Li, Holden; Tan, Say Hwa; Yoon, Yong-Jin Journal: Journal of micromechanics and microengineering Issue: Volume 27:Number 6(2017:Jun.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗