Author/Creator: Legallais, M - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Legallais, M

1. Development of a robust fabrication process for single silicon nanowire-based omega gate transistors on polyamide substrate. (9th December 2020)

Authors:: Arjmand, T; Legallais, M; Haffner, T; Bawedin, M; Ternon, C; Salem, B
Journal:: Semiconductor science and technology
Issue:: Volume 36:Number 2(2021)
Page Start:
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

2. Influence of substrate biasing on structural, chemical and electrical properties of Al2O3 thin films deposited by PEALD. (1st June 2022)

Authors:: Boubenia, S; Lefevre, G; Legallais, M; Labau, S; Bassani, F; Hachemi, M B; Ghibaudo, G; Salem, B
Journal:: Semiconductor science and technology
Issue:: Volume 37:Number 6(2022)
Page Start:
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗