1. Influence of substrate biasing on structural, chemical and electrical properties of Al2O3 thin films deposited by PEALD. (1st June 2022) Authors: Boubenia, S; Lefevre, G; Legallais, M; Labau, S; Bassani, F; Hachemi, M B; Ghibaudo, G; Salem, B Journal: Semiconductor science and technology Issue: Volume 37:Number 6(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗