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Author/Creator Lefaucheux, Philippe

1. Combined analysis methods for investigating titanium and nickel surface contamination after plasma deep etching. (11th November 2021)

Authors:
Ettouri, Rim; Tillocher, Thomas; Lefaucheux, Philippe; Boutaud, Bertrand; Fernandez, Vincent; Fairley, Neal; Cardinaud, Christophe; Girard, Aurélie; Dussart, Rémi
Journal:
Surface and interface analysis
Issue:
Volume 54:Number 2(2022)
Page Start:
134
Record Type:
Journal Article
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2. Mitigation of plasma-induced damage in porous low-k dielectrics by cryogenic precursor condensation. (1st April 2016)

Authors:
Zhang, Liping; de Marneffe, Jean-François; Leroy, Floriane; Lefaucheux, Philippe; Tillocher, Thomas; Dussart, Remi; Maekawa, Kaoru; Yatsuda, Koichi; Dussarrat, Christian; Goodyear, Andy; Cooke, Mike; De Gendt, Stefan; Baklanov, Mikhail R
Journal:
Journal of physics
Issue:
Volume 49:Number 17(2016)
Page Start:
Record Type:
Journal Article
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗