1. CMP Challenges for Advanced Technology Nodes beyond Si. (9th May 2017) Authors: Zhang, John H; Tsai, Stan; Surisetty, Charan; Fronheiser, Jody; Siddiqui, Shariq; Bentley, Steven; Patlolla, Raghuveer; Canaperi, Donald F.; Kleemeier, Walter; Labelle, Cathy Journal: MRS advances Issue: Volume 2:Number 51(2017) Page Start: 2891 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. CMP Challenges for Advanced Technology Nodes. (16th May 2017) Authors: Zhang, John H; Huang, Haigou; Greene, Andrew M.; Xie, Ruilong; Seo, Soon-Cheon; Montanini, Pietro; Tseng, Wei-Tsu; Tsai, Stan; Malley, Matthew; Fang, Qiang; Patlolla, Raghuveer; Koli, Dinesh; Guo, Dechao; Canaperi, Donald F.; Surisetty, Charan; Wynne, Jean E; Kleemeier, Walter; Labelle, Cathy Journal: MRS advances Issue: Volume 2:Number 44(2017) Page Start: 2361 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. CMP: Consideration of Stop-on Selectivity in Advanced Node Semiconductor Manufacturing Technology. (25th April 2017) Authors: Tsai, Stan; Amanapu, Hari; Xie, Ruilong; Zhang, John; Chung, Kisup; Labelle, Cathy; Huang, Haigou; Han, Ja-Hyung; Koli, Dinesh R; Surisetty, Charan Journal: ECS transactions Issue: Volume 77:Number 4(2017) Page Start: 169 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Co Liner Impact on Microstructure of Cu Interconnects. (1st January 2015) Authors: Zhang, Xunyuan; Cao, Linjun; Ryan, Vivian; Ho, Paul S.; Taylor, Bill; Witt, Christian; Labelle, Cathy Journal: ECS journal of solid state science and technology Issue: Volume 4:Number 1(2015) Page Start: N3177 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Co Liner Impact on Microstructure of Cu Interconnects. (4th December 2014) Authors: Zhang, Xunyuan; Cao, Linjun; Ryan, Vivian; Ho, Paul S.; Taylor, Bill; Witt, Christian; Labelle, Cathy Journal: ECS journal of solid state science and technology Issue: Volume 4:Number 1(2015) Page Start: N3177 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗