1. Actinic patterned mask imaging using extreme ultraviolet ptychography microscope with high harmonic generation source. (1st July 2022) Authors: Kim, Young Woong; Lee, Dong Gi; Moon, Seungchan; Ku, Chang Mo; Cho, Joong Hwee; Ahn, Jinho Journal: Applied physics express Issue: Volume 15:Number 7(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗