1. Analysis of dissolution kinetics of narrow polydispersity poly(4-hydroxystyrene) in alkaline aqueous solution using machine learning. (28th May 2021) Authors: Tanaka, Naoki; Watanabe, Kyoko; Matsuoka, Kyoko; Azumagawa, Kazuki; Kozawa, Takahiro; Ikeda, Takuya; Komuro, Yoshitaka; Kawana, Daisuke Journal: Japanese journal of applied physics Issue: Volume 60:Number 6(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Decarboxylation efficiency of carboxylic acids as ligands of metal oxide nanocluster resists upon γ-ray irradiation. (1st March 2022) Authors: Otsuka, Tomoe; Muroya, Yusa; Ikeda, Takuya; Komuro, Yoshitaka; Kawana, Daisuke; Kozawa, Takahiro Journal: Japanese journal of applied physics Issue: Volume 61:Number 3(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Effects of film thickness and alkaline concentration on dissolution kinetics of poly(4-hydroxystyrene) in alkaline aqueous solution. (1st June 2022) Authors: Tanaka, Naoki; Matsuoka, Kyoko; Kozawa, Takahiro; Ikeda, Takuya; Komuro, Yoshitaka; Kawana, Daisuke Journal: Japanese journal of applied physics Issue: Volume 61:Number SD(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Electrostatic effect on the dissolution kinetics of poly(4-hydroxystyrene) in alkaline aqueous solution. (1st August 2022) Authors: Tanaka, Naoki; Kozawa, Takahiro; Ikeda, Takuya; Komuro, Yoshitaka; Kawana, Daisuke Journal: Japanese journal of applied physics Issue: Volume 61:Number 8(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Excluded volume effects caused by high concentration addition of acid generators in chemically amplified resists used for extreme ultraviolet lithography. (3rd July 2017) Authors: Kozawa, Takahiro; Watanabe, Kyoko; Matsuoka, Kyoko; Yamamoto, Hiroki; Komuro, Yoshitaka; Kawana, Daisuke; Yamazaki, Akiyoshi Journal: Japanese journal of applied physics Issue: Volume 56:Number 8(2017) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
6. Modeling and simulation of acid generation in anion-bound chemically amplified resists used for extreme ultraviolet lithography. (12th February 2015) Authors: Komuro, Yoshitaka; Kawana, Daisuke; Hirayama, Taku; Ohomori, Katsumi; Kozawa, Takahiro Journal: Japanese journal of applied physics Issue: Volume 54:Number 3(2015:Mar.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
7. Pulse radiolysis of carboxylic acids used as ligands of metal oxide nanocluster resists. (23rd August 2019) Authors: Yamada, Teppei; Muroya, Yusa; Yamashita, Shinichi; Komuro, Yoshitaka; Kawana, Daisuke; Yamazaki, Akiyoshi; Kozawa, Takahiro Journal: Japanese journal of applied physics Issue: Volume 58:Number 9(2019) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
8. Sensitization mechanism of metal oxide nanocluster resists with carboxylic acid ligands. (1st August 2022) Authors: Otsuka, Tomoe; Muroya, Yusa; Ikeda, Takuya; Komuro, Yoshitaka; Kawana, Daisuke; Kozawa, Takahiro Journal: Japanese journal of applied physics Issue: Volume 61:Number 8(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
9. Study on radical dianions of carboxylates used as ligands of metal oxide nanocluster resists. (17th June 2021) Authors: Ikeuchi, Kengo; Muroya, Yusa; Ikeda, Takuya; Komuro, Yoshitaka; Kawana, Daisuke; Kozawa, Takahiro Journal: Japanese journal of applied physics Issue: Volume 60:Number 7(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗