1. A hybrid model for low pressure inductively coupled plasmas combining a fluid model for electrons with a plasma-potential-dependent energy distribution and a fluid-Monte Carlo model for ions. (12th February 2016) Authors: Mouchtouris, S; Kokkoris, G Journal: Plasma sources science & technology Issue: Volume 25:Number 2(2016:Apr.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗