1. Scheduling and Control of a Wafer Transfer Robot for Foundry Equipment Innovation Competition. Issue 15 (2019) Authors: Song, Kai-Tai; Ou, Song-Qing; Yang, Cheng-An; Sun, Yu-Xuan; Kang, Li-Ren; Wang, Zhen-Yu; Wang, Yu-Shin; Lu, Pei-Chun; Ko, Chun-Long; Chen, Yao Hsiang Journal: IFAC-PapersOnLine Issue: Volume 52:Issue 15(2019) Page Start: 627 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗