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You searched for: Author/Creator Kirchheim, D- Kirchheim, D [remove] 3
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- Physics -- Periodicals 3
- PECVD -- VUV radiation -- UV radiation -- coating adhesion -- oxygen plasma -- bond strength -- surface modification 1
- coating defects -- atomic oxygen -- polymer -- barrier film -- silicon oxide -- PE-CVD -- PE-ALD 1
- gaseous transport -- permeation -- PE-CVD -- oxygen -- transport model -- thin coatings -- barrier coatings 1