1. Plasma etching and surface characteristics depending on the crystallinity of the BaTiO3 thin film. (1st January 2023) Authors: Lee, Han Byeol; Joo, Young-Hee; Patil, Harshada; Kim, Gwan-Ha; Kang, Insu; Hou, Bo; Kim, Deok-kee; Um, Doo-Seung; Kim, Chang-Il Journal: Materials research express Issue: Volume 10:Number 1(2023) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗