1. Characterization of Patterned Porous Low-k Dielectrics: Surface Sealing and Residue Removal by Wet Processing/Cleaning. (1st January 2016) Authors: Le, Q. T.; Kesters, E.; Decoster, S.; Chan, B. T.; Nguyen, M. P.; Conard, T.; Vanleenhove, A.; Holsteyns, F.; De Gendt, S. Journal: ECS journal of solid state science and technology Issue: Volume 5:Number 3(2016) Page Start: N5 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Characterization of Patterned Porous Low-k Dielectrics: Surface Sealing and Residue Removal by Wet Processing/Cleaning. (22nd January 2016) Authors: Le, Q. T.; Kesters, E.; Decoster, S.; Chan, B. T.; Nguyen, M. P.; Conard, T.; Vanleenhove, A.; Holsteyns, F.; De Gendt, S. Journal: ECS journal of solid state science and technology Issue: Volume 5:Number 3(2016) Page Start: N5 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Formation and Wet Removal of Organic and Titanium-Containing Residues on Patterned TiN/Porous Low-k Structure. (19th October 2018) Authors: Le, Q. T.; Kesters, E.; Holsteyns, F. Journal: ECS journal of solid state science and technology Issue: Volume 7:Number 11(2018) Page Start: P602 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Formation and Wet Removal of Organic and Titanium-Containing Residues on Patterned TiN/Porous Low-k Structure. (1st January 2018) Authors: Le, Q. T.; Kesters, E.; Holsteyns, F. Journal: ECS journal of solid state science and technology Issue: Volume 7:Number 11(2018) Page Start: P602 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗