1. Novel method for measurement of transistor gate length using energy-filtered transmission electron microscopy. (11th November 2016) Authors: Lee, Sungho; Kim, Tae-Hoon; Kang, Jonghyuk; Yang, Cheol-Woong Journal: Semiconductor science and technology Issue: Volume 31:Number 12(2016:Dec.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗