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Author/Creator Kakireddy, Raghava

1. Impact of Pad Material Properties on CMP Performance for Sub-10nm Technologies. (1st January 2019)

Authors:
Khanna, Aniruddh J.; Kakireddy, Raghava; Jawali, Puneet; Chockalingam, Ashwin; Redfield, Daniel; Bajaj, Rajeev; Fung, Jason; Cornejo, Mario; Yamamura, Mayu; Yuan, Zhibo; Orilall, Chris; Fu, Boyi; Ganapathi, Gana; Redeker, Fred C; Patibandla, Nag B
Journal:
ECS journal of solid state science and technology
Issue:
Volume 8:Number 5(2019)
Page Start:
P3063
Record Type:
Journal Article
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗

2. Impact of Pad Material Properties on CMP Performance for Sub-10nm Technologies. (28th February 2019)

Authors:
Khanna, Aniruddh J.; Kakireddy, Raghava; Jawali, Puneet; Chockalingam, Ashwin; Redfield, Daniel; Bajaj, Rajeev; Fung, Jason; Cornejo, Mario; Yamamura, Mayu; Yuan, Zhibo; Orilall, Chris; Fu, Boyi; Ganapathi, Gana; Redeker, Fred C; Patibandla, Nag B
Journal:
ECS journal of solid state science and technology
Issue:
Volume 8:Number 5(2019)
Page Start:
P3063
Record Type:
Journal Article
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗

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