1. In-situ Monitoring System Equipped with FT-IR and QMS and Thermal Decomposition of Zr(NCH3C2H5)4 Precursor. (16th August 2016) Authors: Park, In-Sung; Seong, Sejong; Jung, Yongchan; Lee, Taehoon; Ahn, Jin-Ho; An, Jong-Ki; Yun, Juyoung Journal: ECS transactions Issue: Volume 75:Number 6(2016) Page Start: 123 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗