1. Cesium/Xenon dual beam sputtering in a Cameca instrument. (22nd September 2014) Authors: Pureti, R.; Douhard, B.; Joris, D.; Merkulov, A.; Vandervorst, W.; Lee, Yeonhee; Moon, DaeWon; Kang, Hee Jae; Kim, Kyung Joong; Lee, Tae Geol; Lee, Jae Cheol; Yi, Keewook; Hong, Tae Eun Journal: Surface and interface analysis Issue: Volume 46:Number 1(2014:Jan.) Page Start: 25 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗